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International Journal of Thin Film Science and Technology
An International Journal
               
 
 
 
 
 
 
 
 
 
 
 
 

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Volumes > Vol. 14 > No. 3

 
   

Phase Evolution and Optical Response of TiO2 Nanoparticle Films Induced by Controlled Thermal Annealing

PP: 183-186
doi:10.18576/ijtfst/140304
Author(s)
Esraa Almajarish, Kamal Kayed,
Abstract
This study investigates the influence of annealing temperature on the structural, photoluminescence, and optical properties of TiO2 nanoparticle thin films fabricated by thermal oxidation of titanium thin films deposited using electron- beam evaporation. Structural analysis was performed using X-ray diffraction (XRD), while optical and luminescence behavior were studied using UV–Vis transmittance and photoluminescence (PL) spectroscopy. The results revealed clear phase transitions influenced by annealing temperature: anatase phase appeared at low (100 °C) and high (500 °C) temperatures, rutile emerged at 200–300 °C, and brookite was identified at 400 °C. These phase changes strongly impacted the optical band gap and PL emission. A red-shift in PL peaks with increasing temperature indicated nanoparticle growth, while the weakest PL signal was associated with brookite formation. The anatase-rich samples showed higher band gaps and stronger PL intensity, confirming a strong correlation between structural phase and optoelectronic performance. These findings demonstrate the critical role of thermal treatment in tailoring TiO2 thin films for advanced applications.

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