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Multiphysic Simulations Approach toward Better Functional Modeling of An EM Transduction Pressure Sensor |
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PP: 619-624 |
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Author(s) |
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Mingli Ding,
Xiaobing Li,
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Abstract |
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| Based on the electromagnetic transduction principle, a passive and wireless pressure sensor with a high sensitivity is
designed. In the passive and wireless pressure sensor, the applied pressure generates a displacement of a thin membrane located
above a planar millimeter-wave resonator. However, in previous works, the real membrane deflection has not been incorporated in
the electromagnetic simulations and a uniform membrane deflection was assumed instead. In order to have a functional estimation of
the real measurement unit, multiphysic simulations have to be performed with consideration of the electromagnetic and mechanical
properties of the sensor. Therefore, this paper presents a progressive approach to derive an accurate functional approximation of the
sensor under the real working condition and to take into account the real deflection of the membrane when applying a pressure. |
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