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International Journal of Nanomaterials and Chemistry
An International Journal


Volumes > Volume 3 > No. 2


Synthesis of La2O3 Nanoparticles using Glutaric acid and Propylene glycol for Future CMOS Applications

PP: 21-25
Amanullakhan A. Pathan, Kavita R. Desai, C. P. Bhasin,
In This Research paper deals with the preliminary studies on synthesis and characterization of lanthanum oxide (La2O3) nanoparticles follow Pechini method but using different reactants (Glutaric acid and Propylene glycol). In future, leading manufacturer of integrated circuits recently announced to introduce hafnium and lanthanum based high- κ dielectrics in their next CMOS generations and also Lanthanum oxides exhibit some important applications such as luminescent devices, sensors, up-conversion materials, and catalytic fields. The research focuses now - called “higher-κ” materials with a dielectric constant of above 30 in order to satisfy the demands for future CMOS applications. FTIR spectroscopy was done for observing the presence of La-O bond. The synthesized lanthanum oxide nanoparticles were characterized by X-ray diffraction (XRD), Scanning Electron Microscopy (SEM) and Transmission Electron Microscopy (TEM) for morphological and crystalline size determination. In XRD analysis, the average particle size was shown near 18-28 and 36-46 nm respectively Ψ=1 and Ψ=1.30. Thermals analysis was done by TGA-DSC Analyzer.

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